Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10323322 | Gas inlet element of a CVD reactor with weight-reduced gas outlet plate | Michael D. Long, Markus Gersdorff | 2019-06-18 |
| 10221482 | Gas distributor for a CVD reactor | Thomas Krücken, Martin Dauelsberg | 2019-03-05 |