Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7631651 | Cleaning method of semiconductor manufacturing apparatus and semiconductor manufacturing apparatus | — | 2009-12-15 |
| 7272937 | Cooling device | Hideo Mita, Tetsuya Gotou, Motohiro Igarasi, Toshiyuki Amano, Yoshihiro Jizo | 2007-09-25 |
| 7047750 | Pulse tube refrigerating machine | Hideo Mita, Tetuya Gotou, Motohiro Igarasi | 2006-05-23 |
| 5154773 | Vapor phase epitaxial growth apparatus having exhaust unit for removing unwanted deposit | — | 1992-10-13 |