Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5052339 | Radio frequency plasma enhanced chemical vapor deposition process and reactor | Ward D. Halverson, Diwakar Garg, Paul N. Dyer | 1991-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5052339 | Radio frequency plasma enhanced chemical vapor deposition process and reactor | Ward D. Halverson, Diwakar Garg, Paul N. Dyer | 1991-10-01 |