Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534413 | Method to remove metal and silicon oxide during gas-phase sacrificial oxide etch | Scott Edward Beck | 2003-03-18 |
| 6159859 | Gas phase removal of SiO.sub.2 /metals from silicon | David A. Bohling, Mark George, Scott Edward Beck | 2000-12-12 |