Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7486430 | Single-crystal-silicon 3D micromirror | Ajay Agarwal, Janak Singh, Xiaolin Zhang | 2009-02-03 |
| 7091057 | Method of making a single-crystal-silicon 3D micromirror | Ajay Agarwal, Janak Singh, Xiaolin Zhang | 2006-08-15 |