Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12306530 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Takuma Kato, Daijiro AKAGI, Ryusuke OISHI, Yusuke Ono | 2025-05-20 |
| 12228853 | Reflective mask blank, reflective mask, and manufacturing method | — | 2025-02-18 |
| 12001133 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Takuma Kato, Daijiro AKAGI, Ryusuke OISHI, Yusuke Ono | 2024-06-04 |