Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696209 | Method for measuring temperature of film in reaction chamber | Lu Chen, Chaoqian Zhang, Yanzhong Ma, Zhehao Chen, Steven Tianxiao Lee | 2017-07-04 |
| 9443715 | Method and device for measuring temperature of substrate in vacuum processing apparatus | Steven Tianxiao Lee, David Z. Chen | 2016-09-13 |