Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10240231 | Chemical vapor deposition apparatus and its cleaning method | Zhiyou Du, Peijin Xing, Wenyuan FAN | 2019-03-26 |
| 9382619 | Cleaning apparatus and method, and film growth reaction apparatus and method | Yijun Sun, Zhiyou Du | 2016-07-05 |