Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8334657 | RF matching network of a vacuum processing chamber and corresponding configuration methods | — | 2012-12-18 |
| 7868556 | RF matching network of a vacuum processing chamber and corresponding configuration methods | — | 2011-01-11 |
| 7682483 | Vacuum processing chamber and method of processing a semiconductor work piece | — | 2010-03-23 |
| 6712996 | Color temperature indicator | Jun-Zhong Wu, Joseph W. Stucki | 2004-03-30 |