| 6407870 |
Optical beam shaper and method for spatial redistribution of inhomogeneous beam |
Ihar Hurevich, Dimitri Velikov, Andrey Shalapenok, Alexander Shkolnik |
2002-06-18 |
| 6250250 |
Multiple-cell source of uniform plasma |
Yuri Maishev, Leonid Velikov, Alexander Shkolnik |
2001-06-26 |
| 6246059 |
Ion-beam source with virtual anode |
Yuri Maishev, Leonid Velikov, Alexander Shkolnik |
2001-06-12 |
| 6242749 |
Ion-beam source with uniform distribution of ion-current density on the surface of an object being treated |
Yuri Maishev, Leonid Velikov, Alexander Shkolnik |
2001-06-05 |
| 6238526 |
Ion-beam source with channeling sputterable targets and a method for channeled sputtering |
Yuri Maishev, Leonid Velikov, Alexander Shkolnik |
2001-05-29 |
| 6236163 |
Multiple-beam ion-beam assembly |
Yuri Maishev, Yuri Terentiev, Leonid Velikov, Alexander Shkolnik |
2001-05-22 |
| 6216842 |
Object conveying surface with liner and method of applying the liner to the surface |
Scott Beale |
2001-04-17 |
| 6214183 |
Combined ion-source and target-sputtering magnetron and a method for sputtering conductive and nonconductive materials |
Yuri Maishev, Leonid Velikov, Alexander Shkolnik |
2001-04-10 |
| 6196370 |
Package conveying surface with liner |
Scott Beale |
2001-03-06 |
| 6153067 |
Method for combined treatment of an object with an ion beam and a magnetron plasma with a combined magnetron-plasma and ion-beam source |
Yuri Maishev, Leonid Velikov |
2000-11-28 |
| 6147354 |
Universal cold-cathode type ion source with closed-loop electron drifting and adjustable ionization gap |
Yuri Maishev, Leonid Velikuv |
2000-11-14 |
| 6130507 |
Cold-cathode ion source with propagation of ions in the electron drift plane |
Yuri Maishev, Yuri Terentiev, Leonid Velikov |
2000-10-10 |
| 6081381 |
Apparatus and method for reducing spatial coherence and for improving uniformity of a light beam emitted from a coherent light source |
Andrey Shalapenok, Ihar Hurevich, Dimitri Velikov, Alexander Shkolnik |
2000-06-27 |
| 6037717 |
Cold-cathode ion source with a controlled position of ion beam |
Yuri Maishev, Leonid Velikov, Alexander Shkolnik |
2000-03-14 |
| 6002208 |
Universal cold-cathode type ion source with closed-loop electron drifting and adjustable ion-emitting slit |
Yuri Maishev, Leonid Velikov |
1999-12-14 |