Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946667 | Apparatus to decelerate and control ion beams to improve the total quality of ion implantation | Jiong Chen, Qing Qian | 2005-09-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946667 | Apparatus to decelerate and control ion beams to improve the total quality of ion implantation | Jiong Chen, Qing Qian | 2005-09-20 |