Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7687784 | Method and device of ion source generation | Nai-Yuan Cheng, Yun-Ju Yang, Cheng-Hui Shen, Junhua Hong, Jiong Chen +1 more | 2010-03-30 |
| 6489622 | Apparatus for decelerating ion beams with minimal energy contamination | Jin-Liang Chen | 2002-12-03 |
| 6313428 | Apparatus and method for reducing space charge of ion beams and wafer charging | Jin-Liang Chen | 2001-11-06 |