Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817340 | System and method for improved electrostatic chuck clamping performance | — | 2023-11-14 |
| 11680975 | Measurement and adjustment of a charge of a workpiece | — | 2023-06-20 |
| 11282732 | System and method for clamping a work piece | Toshio Uehara, Peter McAnn | 2022-03-22 |
| 11199438 | Triboelectric-based cable sensors | — | 2021-12-14 |
| 11073544 | System and method to measure and adjust a charge of a workpiece | — | 2021-07-27 |
| 11011986 | High energy pulse on a high-voltage-direct-current offset | — | 2021-05-18 |