| 12362148 |
Apparatus for treating substrate and assembly for distributing gas |
— |
2025-07-15 |
| 11408071 |
Gas supplying unit of substrate treating apparatus |
Jin Hyun Lee |
2022-08-09 |
| 8834673 |
Process chamber having gate slit opening and closing apparatus |
— |
2014-09-16 |
| 8623173 |
Substrate processing apparatus having electrode member |
— |
2014-01-07 |
| 8349082 |
Vacuum processing apparatus |
Young Jong Lee, Jun Young Choi, Jeong-Bin Lee, Gyeong-Hoon Kim, Hyung-Soo Kim +1 more |
2013-01-08 |
| 8187384 |
Vacuum processing apparatus |
Young Jong Lee, Jun Young Choi, Jeong-Bin Lee, Gyeong-Hoon Kim, Hyung-Soo Kim +1 more |
2012-05-29 |
| 8152926 |
Vacuum processing apparatus |
Young Jong Lee, Jun Young Choi, Jeong-Bin Lee, Gyeong-Hoon Kim, Hyung-Soo Kim +1 more |
2012-04-10 |
| 8075691 |
Vacuum processing apparatus |
Young Jong Lee, Jun Young Choi, Jeong-Bin Lee, Gyeong-Hoon Kim, Hyung-Soo Kim +1 more |
2011-12-13 |
| 7988817 |
Lift pin driving device and a flat panel display manufacturing apparatus having same |
— |
2011-08-02 |
| 7770478 |
Apparatus and method for measuring chuck attachment force |
— |
2010-08-10 |
| 7690913 |
Embossing apparatus and method |
— |
2010-04-06 |