Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9526160 | Cavity resonator of microwave plasma generating apparatus | Katsumi Oi | 2016-12-20 |
| 7858899 | Coaxial microwave plasma torch | Raju Ramasamy, Takuya Urayama, Kazunari Fujioka | 2010-12-28 |
| 7683342 | Plasma source | Gregor Morfill, Tetsuji Shimizu, Bernd Steffes | 2010-03-23 |
| 7514377 | Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device | Noriyoshi Sato, Takeshi Taniguchi, Hiroshi Mase, Tamiya Fujiwara | 2009-04-07 |
| 6080271 | Plasma source for generating inductively coupled, plate-shaped plasma, having magnetically permeable core | — | 2000-06-27 |
| 5936481 | System for impedance matching and power control for apparatus for high frequency plasma treatment | — | 1999-08-10 |