Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293933 | Electrostatic chuck with multiple heater zones | Sang-Woo Lee | 2025-05-06 |
| 11841284 | Particle trapping apparatus for preventing an error of a pressure measurement | Sang-Woo Lee, Hwi Gon JANG, Gyoung Ho Kwon | 2023-12-12 |
| 11538702 | Apparatus for monitoring an exchanging process of a semiconductor part and a method for the same | Sang-Woo Lee | 2022-12-27 |
| 11315764 | Structure variable type of a plasma source coil and a method for controlling the same | Sang-Woo Lee | 2022-04-26 |
| 7583953 | Method and device for subdividing data service charges in a network | Mi-Na Oh, Sung-Chul Kim, Sung-Il Jin | 2009-09-01 |