Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11927741 | Micro-electro-mechanical systems micromirrors and micromirror arrays | — | 2024-03-12 |
| 11567312 | Micro-electro-mechanical systems micromirrors and micromirror arrays | — | 2023-01-31 |
| 10551613 | Micro-electro-mechanical systems micromirrors and micromirror arrays | — | 2020-02-04 |
| 9385634 | Rotational type of MEMS electrostatic actuator | — | 2016-07-05 |
| 9086571 | MEMS optical device | — | 2015-07-21 |
| 9036231 | Micro-electro-mechanical systems micromirrors and micromirror arrays | — | 2015-05-19 |
| 8472105 | MEMS micromirror and micromirror array | — | 2013-06-25 |
| 8389349 | Method of manufacturing a capacitive transducer | — | 2013-03-05 |
| 8238018 | MEMS micromirror and micromirror array | — | 2012-08-07 |
| 8165323 | Monolithic capacitive transducer | — | 2012-04-24 |
| 7911672 | Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore | — | 2011-03-22 |
| 7743661 | Fiber optic MEMS seismic sensor with mass supported by hinged beams | John W. Berthold, Ira Jeffrey Bush, Fred McNair | 2010-06-29 |
| 7535620 | Micro-electro-mechanical system micro mirror | — | 2009-05-19 |