Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6726823 | Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpieces | Hui Wang, Voha Nuch | 2004-04-27 |
| 5811820 | Parallel ion optics and apparatus for high current low energy ion beams | Nicholas J. Kirchner, Oleg Alexandrov, Efim A. Dynin | 1998-09-22 |