Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8545290 | Wafer polishing apparatus and method | Vladimir Volovich | 2013-10-01 |
| 6875076 | Polishing machine and method | Igor Kravtsov, Herbert W. Owens, Jr., William J. Stone, Vladimir Volovich, Yakov Keyfes | 2005-04-05 |
| 6494775 | Wafer carrier having more support ribs and lighter weight and method | Herb Wayne Owens, Jr., Vladimir Volovich | 2002-12-17 |