Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341052 | Wafer cleaning apparatus | Sung Yup Kim, Nam-Jin Kim | 2025-06-24 |
| 12322607 | Wafer processing apparatus and wafer processing method | Kuem Dong HEO, Kang-Won Lee, Woon Kong | 2025-06-03 |
| 12261076 | Wafer processing apparatus and wafer processing method | Sung Yup Kim, Jun Goo PARK | 2025-03-25 |