Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412731 | Coil structure and plasma processing apparatus | Ying Zhang, Xing Chen, Gang Wei, Chen-Yi Niu, Jinji XU +1 more | 2025-09-09 |
| 12387906 | Coil structure for generating plasma and semiconductor equipment | Song Wang, Gang Wei, Jinji XU | 2025-08-12 |