Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371783 | Internal chamber processing method and substrate processing method | Ah Young Hwang, Won-Jun Jang, Kyung PARK, Jin Seo Kim, Won Sik Ahn +2 more | 2025-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371783 | Internal chamber processing method and substrate processing method | Ah Young Hwang, Won-Jun Jang, Kyung PARK, Jin Seo Kim, Won Sik Ahn +2 more | 2025-07-29 |