Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12234383 | Low dishing oxide CMP polishing compositions for shallow trench isolation applications and methods of making thereof | Xiaobo Shi, Joseph D. Rose, Hongjun Zhou, Mark Leonard O'Neill | 2025-02-25 |
| 12205061 | Shared data induced quality control for a chemical mechanical planarization process | Cesar Clavero, Vid Gopal, Ryan W. Clarke, Esmeralda Yitamben, Hieu Pham +6 more | 2025-01-21 |