Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399437 | Debris mitigation device and light source apparatus including the same | Noritaka Ashizawa | 2025-08-26 |
| 12321107 | Extreme ultraviolet light source device and protection method for receiving plate member | Nobuaki Miyagawa | 2025-06-03 |