Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12216072 | Reticle thermal expansion calibration method capable of improving sub-recipe | Yuan-Chi Pai, Wen Yi Tan | 2025-02-04 |
| 12204247 | Lithography film stack and lithography method | Ching-Shu Lo, Yuan-Chi Pai, Wen Yi Tan | 2025-01-21 |