Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424419 | Ion beam etching chamber with etching by-product redistributor | Lee-Chuan Tseng | 2025-09-23 |
| 12362154 | Ion beam etching chamber with etching by-product redistributor | Lee-Chuan Tseng | 2025-07-15 |