Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217969 | Silicon dry etching method | Toshiyuki Sakuishi, Toshiyuki Nakamura, Yasuhiro Morikawa | 2025-02-04 |
| 12205795 | Plasma processing device | Taichi Suzuki, Yasuhiro Morikawa, Toshiyuki Nakamura | 2025-01-21 |