Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371789 | Vapor deposition device and carrier used in same | Yu MINAMIDE | 2025-07-29 |
| 12261065 | Control device and control method for single-wafer processing epitaxial growth apparatus, and epitaxial wafer production system | — | 2025-03-25 |