Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198964 | Electrostatic chuck and processing apparatus | Shuichiro Saigan, Tatsuya Mori, Yuki Sasaki, Masahiro Watanabe | 2025-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198964 | Electrostatic chuck and processing apparatus | Shuichiro Saigan, Tatsuya Mori, Yuki Sasaki, Masahiro Watanabe | 2025-01-14 |