Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12395101 | Electrostatic chuck | Tetsuro ITOYAMA | 2025-08-19 |
| 12374574 | Electrostatic chuck | Akihito Ono, Tatsuya Hayakawa | 2025-07-29 |
| 12341049 | Electrostatic chuck including a heater element with mutiple heating zones | Akihito Ono | 2025-06-24 |
| 12341050 | Electrostatic chuck | Akihito Ono, Tetsuro ITOYAMA, Tomoki UMETSU | 2025-06-24 |