Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362156 | Substrate processing method and substrate processing apparatus | Tsuyoshi Takahashi | 2025-07-15 |
| 12224194 | Substrate processing system and method for controlling substrate processing system | — | 2025-02-11 |
| 12211676 | Measurement system, measurement method, and plasma processing device | Ayuta Suzuki, Hidefumi Matsui | 2025-01-28 |