Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12367602 | Information processing apparatus for teaching transfer position of substrate, transfer position teaching method, and substrate processing apparatus including the information processing apparatus | Tadashi Enomoto, Nao Akashi | 2025-07-22 |
| 12230523 | Substrate processing apparatus and image capturing method | Tadashi Enomoto, Nao Akashi, Masakazu Yamamoto | 2025-02-18 |