Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371784 | Gas management method and substrate processing system | Koji Sasaki, Katsuyuki Higashi | 2025-07-29 |
| 12205817 | Method for depositing film and film deposition system | Hitoshi Kato, Toru Ishii, Yuichiro Sase | 2025-01-21 |