Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365985 | Deposition apparatus with pressure sensor and shower head on same plane and deposition method | Tsuneyuki Okabe | 2025-07-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365985 | Deposition apparatus with pressure sensor and shower head on same plane and deposition method | Tsuneyuki Okabe | 2025-07-22 |