Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400841 | Trap device and semiconductor manufacturing device | Hiroki Sakabe | 2025-08-26 |
| 12392033 | Substrate processing apparatus and substrate processing method | Masamichi Hara | 2025-08-19 |
| 12344930 | Deposition method and deposition apparatus | Kohichi Satoh, Masato Araki | 2025-07-01 |