TH

Tsutomu Hiroki

TL Tokyo Electron Limited: 1 patents #256 of 785Top 35%
Overall (2025): #185,682 of 469,880Top 40%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12261060 Substrate processing apparatus and stage cleaning method — 2025-03-25