Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406835 | Temperature controller, substrate processing apparatus, and pressure control method | — | 2025-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406835 | Temperature controller, substrate processing apparatus, and pressure control method | — | 2025-09-02 |