TM

Tomohiko Muta

TL Tokyo Electron Limited: 1 patents #256 of 785Top 35%
Overall (2025): #188,152 of 469,880Top 45%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12261064 Tank, substrate processing apparatus, and method of using the tank Daiki Shibata, Akiko Kai, Makoto Ogata 2025-03-25