Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371796 | Substrate processing apparatus, substrate processing method, and chemical liquid | Hitoshi Kosugi | 2025-07-29 |
| 12203021 | Substrate processing device and etching liquid | Koukichi Hiroshiro, Koji Kagawa, Kenji Sekiguchi, Kazuyoshi Mizumoto | 2025-01-21 |