Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12409470 | Substrate processing apparatus and substrate processing method | Koichi Matsunaga, Hideaki Iwasaka | 2025-09-09 |
| 12230515 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Takanori Obaru, Yasushi Takiguchi | 2025-02-18 |