TS

Takashi Sakuma

TL Tokyo Electron Limited: 1 patents #256 of 785Top 35%
Overall (2025): #198,008 of 469,880Top 45%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12347676 Substrate processing method and substrate processing system Yuichiro WAGATSUMA, Masahisa Watanabe, Mayuko NAKAMURA, Osamu Yokoyama, Kwangpyo Choi 2025-07-01