TM

Takahisa Mase

TL Tokyo Electron Limited: 1 patents #256 of 785Top 35%
Overall (2025): #199,202 of 469,880Top 45%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12256471 Apparatus for heating substrate and method thereof — 2025-03-18