Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416075 | Film-forming method and film-forming system | Masato Araki, Kohichi Satoh | 2025-09-16 |
| 12404582 | Method and apparatus for embedding ruthenium in recess formed on substrate surface | Mikio Suzuki, Toshio Hasegawa | 2025-09-02 |
| 12227841 | Ruthenium film forming method and substrate processing system | — | 2025-02-18 |