Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12415248 | Substrate polishing apparatus, substrate polishing method using the same, and semiconductor fabrication method including the same | Hyojin Park, Sung Yong Park, Keon Woo Kim | 2025-09-16 |
| 12394640 | Apparatus for cleaning wafer | Hyojin Park, Sungyong Park, Kiseok Lee | 2025-08-19 |