Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300469 | Plasma processing apparatus, calculation method, and calculation program | — | 2025-05-13 |
| 12278126 | Plasma processing apparatus, thermal resistance acquisition method, and thermal resistance acquisition program | — | 2025-04-15 |
| 12243728 | Substrate holding method and substrate processing apparatus | — | 2025-03-04 |