Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394605 | Plasma processing system and edge ring replacement method | Kenichi Kato | 2025-08-19 |
| 12374533 | Plasma processing system and method of mounting annular member | — | 2025-07-29 |