Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412728 | Electron beam inspection system | Ryuichi Kusakabe | 2025-09-09 |
| 12222658 | Stage apparatus and electron beam lithography system | Hirofumi Miyao | 2025-02-11 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412728 | Electron beam inspection system | Ryuichi Kusakabe | 2025-09-09 |
| 12222658 | Stage apparatus and electron beam lithography system | Hirofumi Miyao | 2025-02-11 |