NI

Norihiro Itoh

TL Tokyo Electron Limited: 1 patents #256 of 785Top 35%
Overall (2025): #263,623 of 469,880Top 60%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12202016 Substrate cleaning apparatus, substrate cleaning method, and non-transitory computer-readable recording medium Yuki Ito 2025-01-21