Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411479 | Method and apparatus for determining cause of abnormality in a semiconductor manufacturing chamber | Kazushi Shoji, Shintaro SARUWATARI, Motokatsu Miyazaki | 2025-09-09 |