Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12260548 | Abnormality detection apparatus and abnormality detection method | — | 2025-03-25 |
| 12244972 | Substrate processing monitoring apparatus based on imaging video data, substrate processing apparatus, substrate processing monitoring method, and storage medium | Yuichiro KUNUGIMOTO, Keishi Hamada, Takafumi Hayama, Shoki HAMAGUCHI | 2025-03-04 |